Title

Spark Source Mass Spectrographic Analysis of Gallium Arsenide for Trace Oxygen and Carbon Using Liquid Helium Cryopumping

Document Type

Article

Publication Date

1983

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Abstract

A spark source mass spectrometric system has been developed for trace levels of oxygen and carbon in gallium arsenide using liquid helium cryopumping of the source chamber. Following bake-out, a collector positioned inside the source chamber is cooled using a controlled flow of liquid helium. Residual back-ground gases are more effectively removed than with liquid nitrogen and detectabilities of 0.02 ppma for oxygen and 0.05 ppma for carbon have been obtained. Routine analyses are carried out with a moderate consumption of liquid helium.

DOI

10.1080/00032718308065255

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