GaAs Whole-Wafer Dislocation Mapping for Qualifying Substrates

Authors

M. G. Mier
David C. Look, Wright State University - Main CampusFollow
D. C. Walters
J. R. Sizelove

Document Type

Conference Proceeding

Publication Date

1990

Find this in a Library

Catalog Record

Comments

Presented at the 1990 U.S. Conference on GaAs Manufacturing Technology, Reno, NV.

Repository Citation

Mier, M. G., Look, D. C., Walters, D. C., & Sizelove, J. R. (1990). GaAs Whole-Wafer Dislocation Mapping for Qualifying Substrates. Proceedings of the U.S. Conference on GaAs Manufacturing Technology, 7.
https://corescholar.libraries.wright.edu/physics/663