Fabrication of Microelectromechanical Systems (MEMS) Cantilevers for Photoacoustic (PA) Detection of Terahertz (THz) Radiation

Authors

R. Newberry
N. Glauvitz
R. Coutu Jr.
Ivan Medvedev, Wright State University - Main CampusFollow
Douglas T. Petkie, Wright State University - Main CampusFollow

Document Type

Conference Proceeding

Publication Date

3-7-2014

Comments

Presented at the Micromachining and Microfabrication Process Technology XIX Conference, San Francisco, CA, February 4-6, 2014.

Repository Citation

Newberry, R., Glauvitz, N., Coutu, R., Medvedev, I., & Petkie, D. T. (2014). Fabrication of Microelectromechanical Systems (MEMS) Cantilevers for Photoacoustic (PA) Detection of Terahertz (THz) Radiation. Proceedings of SPIE, 8973.
https://corescholar.libraries.wright.edu/physics/789

DOI

10.1117/12.2037376