Identification of Contact Regions in Semiconductor Transistors by Level Set Methods
In this paper we present the formulation of level-set methods for the inverse problem of identifying an interface in the coefficient of an elliptic equation from a boundary measurement. This problem arises from the modeling of the identification of contact regions by boundary measurements for semiconductor transistors. We propose the Gauss–Newton direction as the interface velocity, and implement the scheme for a parameterized class of interfaces.
& Ito, K.
(2003). Identification of Contact Regions in Semiconductor Transistors by Level Set Methods. Journal of Computational and Applied Mathematics, 159 (2), 399-410.