Non-destructive, In situ Measurements of Diamond-Like-Carbon Film Hardness using Raman and Rayleigh Scattering

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Diamond-like Carbon (DLC) coatings have recently proven to be suitable for a number of tribological applications. Hardness of the DCL coating is very important for such application. An in-situ, non-destructive technique to measure the film hardness would be crucial for process control and quality control of DLC coatings. In this study, Raman and Rayleigh scattering were investigated as potential techniques for non-destructive measurements of DLC film hardness. Features in both Raman and Rayleigh spectra were correlated with film hardness as measured by nano-indentation technique. Regarding the Raman spectra of the film, a linear correlation was found between film hardness and area under diamond related peak at 1332 cm−1. Regarding the Rayleigh scattering, a linear relationship was, also, found between the film hardness and the height of the Rayleigh line. Raman and Rayleigh scattering have shown huge potential to be used as non-destructive, in-situ techniques to measure DLC coating hardness.



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