Image Processing Plume Fluence for Superconducting Thin-Film Depositions

Authors

J. G. Jones, Wright-Patterson Air Force
R. R. Biggers, Wright-Patterson Air Force
J. D. Busbee, Wright-Patterson Air Force
D. V. Dempsey, Wright-Patterson Air Force
Gregory Kozlowski, Wright State University - Main CampusFollow

Document Type

Article

Publication Date

1-1-1999

Identifier/URL

40298517 (Pure); 85040041868 (QABO)

Abstract

Process control is a crucial element in all deposition techniques. It is especially elusive in the versatile and efficient deposition technique known as pulsed-laser-deposition (PLD). Image processed emissions from the plume of a YBa2Cu3O/sub 7-x/ (YBCO) target are monitored in situ to determine two dimensional spatial information about the plume. Manual and fuzzy-logic based regulation of laser energy based on this plume emission feedback resulted in improved film quality and repeatability of the PLD thin-film depositions. Imaging of the plume under various deposition conditions, both with and without process control, will help to improve understanding of the effect of changing environmental conditions on the plume characteristics.

Comments

Publisher Copyright: © 1999 IEEE.

Repository Citation

Jones, J. G., Biggers, R. R., Busbee, J. D., Dempsey, D. V., & Kozlowski, G. (1999). Image Processing Plume Fluence for Superconducting Thin-Film Depositions. Proceedings of the 2nd International Conference on Intelligent Processing and Manufacturing of Materials, IPMM 1999, 2, 1317-1320.
https://corescholar.libraries.wright.edu/physics/1138

DOI

10.1109/IPMM.1999.791562