A Compact Low-Loss Ka-Band Filter Using 3-Dimensional Micromachined Integrated Coax

Authors

R. T. Chen, Microfabrica Inc.
Elliott R. Brown, Wright State University - Main CampusFollow
C. A. Bang, Microfabrica Inc.

Document Type

Conference Proceeding

Publication Date

1-1-2004

Identifier/URL

43034966 (Pure)

Abstract

This paper presents a novel low-loss (1.74dB) 3-pole Butterworth distributed filter operating in the Ka-band with a center frequency of 29GHz. The filter has a compact 6mm square footprint and is designed using 3-dimensional (3D) micromachined integrated coax. The integrated coax transmission lines are made of forty-one nickel layers and fabricated using a selective electrochemical metal deposition process (EFAB™). Full-wave simulations of the filter using Ansoft HFSS show very good agreement on insertion loss compared with measured results. Using the EFAB™, we have been able to produce low-loss, all-metal, completely shielded transmission lines with small bend radii and no inter-line coupling.

Repository Citation

Chen, R. T., Brown, E. R., & Bang, C. A. (2004). A Compact Low-Loss Ka-Band Filter Using 3-Dimensional Micromachined Integrated Coax. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 801-804.
https://corescholar.libraries.wright.edu/physics/1341

DOI

10.1109/MEMS.2004.1290706