High Conductance in Ultrathin Films of ZnO
Document Type
Article
Publication Date
5-1-2014
Identifier/URL
40897368 (Pure)
Abstract
Lattice-matched thin films of Ga-doped ZnO (GZO) grown on ZnO substrates have significantly better electrical properties than those grown on quartz substrates. At room temperature, mobility in a 125-nm-thick GZO layer grown by pulsed laser deposition on ZnO is increased by 30%, concentration by 50%, and conductivity by 95% over a similar layer grown on quartz. For ultrathin layers, the differences are much more dramatic: a 5-nm-thick GZO layer grown on ZnO has an excellent resistivity of 4 × 10−4 Ω cm, whereas one grown on quartz exhibits no measurable conductance.
Repository Citation
Look, D. C.,
Heller, E. R.,
Yao, Y. F.,
& Yang, C. C.
(2014). High Conductance in Ultrathin Films of ZnO. Japanese Journal of Applied Physics, 53 (5 SPEC. ISSUE 1), 05FJ01.
https://corescholar.libraries.wright.edu/physics/1513
DOI
10.7567/JJAP.53.05FJ01
