Document Type

Article

Publication Date

3-1-1986

Comments

Copyright © 1986, American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in the Journal of Vacuum Science & Technology B 4.2, and may be found at http://avspublications.org/jvstb/resource/1/jvtbd9/v4/i2/p545_s1.

DOI

10.1116/1.583425


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