A Micro-Cantilever Based Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing

Authors

Nathan E. Glauvitz
Ronald A. Coutu Jr.
Douglas T. Petkie, Wright State University - Main CampusFollow
Ivan Medvedev, Wright State University - Main CampusFollow

Document Type

Conference Proceeding

Publication Date

9-2013

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Abstract

A Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to Terahertz (THz) radiation. This paper describes manufacturing, experimental set-up and the most recent spectroscopic results, which demonstrate the capabilities of this spectroscopic technique.

Comments

Presented at the 38th International Conference on Infrared, Millimeter, and Terahertz Waves, Mainz, Germany, September 1-6, 2013.

Repository Citation

Glauvitz, N. E., Coutu, R. A., Petkie, D. T., & Medvedev, I. (2013). A Micro-Cantilever Based Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing. 38th International Conference on Infrared, Millimeter, and Terahertz Waves, 1-3.
https://corescholar.libraries.wright.edu/physics/791

DOI

10.1109/IRMMW-THz.2013.6665540