Publication Date


Document Type


Committee Members

Marian Kazimierczuk (Advisor), Ronald Riechers (Committee Member), Raymond Siferd (Committee Member)

Degree Name

Master of Science in Engineering (MSEgr)


Integrated inductors, also called spiral inductors, on-chip inductors, or planarinductors, are inseparable part in radio frequency integrated circuits (RFICs). Increasing growth in RFICs from the past few decades has forced study of these components in greater detail. Apart from IC inductors, there are several components mounted on a chip - namely capacitors, resistors, MOSFETs, diodes etc. It is extremely important to understand the electrical and magnetic behavior of all these components. Electrical behavior of these components is easy to understand. However, the real challenge lies in realizing and predicting the magnetic behavior of components, namely, inductors and capacitors. Capacitors have their own physical model developed for accurate modeling, but for inductors there are many factors to be considered. As the frequencies in RFICs are in the GHz range, factors such as self resonant frequency (SRF), quality factor (Q), self and mutual inductance are critical to design due to the very small size of inductor. Past research in this field has made it possible to predict magnetic behavior accurately by theoretical methods and/or electromagnetic simulators. Apart from these simulators, various equations have been derived for accurate calculation of inductance related to several geometries. Lumped physical models developed in the past help to model parasitic elements most accurately.

This thesis concentrates on a brief study of integrated inductors, their construction and modeling. Different electromagnetic simulators available in the market are reviewed. A MATLAB based spiral and pi network calculators have been developed. Spiral calculators help to compare different equations while a pi calculator solves for parasitic components depending on substrate material, dielectric layer thickness, and metal oxide thickness. The main aim of this research was to design a theoretical design procedure for designing inductor internal dimensions. It has been described briefly with the design example. The proposed method makes it easy to design internal dimension such as the inner diameter (d), width (w), spacing (s), height (h), and number of turns (N). The results obtained are closer to the desired ones.

Page Count


Department or Program

Department of Electrical Engineering

Year Degree Awarded