MEMS and Si Micromachined Circuits for High-Frequency Applications

Authors

Linda P.B. Katehi, University of Michigan, Ann Arbor
James F. Harvey, U.S. Army Research Office
Elliott R. Brown, Wright State University - Main CampusFollow

Document Type

Article

Publication Date

3-1-2002

Identifier/URL

43035344 (Pure)

Abstract

RF micromachining and microelectromechanical structure (MEMS) technology promise to provide an innovative approach in the development of effective and low-cost circuits and systems. This technology is expected to have significant application in the development of low-cost antenna arrays and reconfigurable apertures, due to its potential to support novel systems architectures. This paper presents a brief history and the state-of-the-art in the development of RF MEMS devices, with primary emphasis on switches and Si-micromachined circuit components for use in high-performance high-density on-wafer packaged circuits.

Repository Citation

Katehi, L. P., Harvey, J. F., & Brown, E. R. (2002). MEMS and Si Micromachined Circuits for High-Frequency Applications. IEEE Transactions on Microwave Theory and Techniques, 50 (3), 858-866.
https://corescholar.libraries.wright.edu/physics/1355

DOI

10.1109/22.989969